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UV for Microelectronics

Improve the quality of ultrapure water in microelectronics with UV

Manufacturing processes in the microelectronics and semiconductor industries require ultrapure water at nearly every stage. Treating intake water to high quality levels requires processes and water treatment technologies to remove contaminants, minerals, microorganisms, and trace organic and inorganic chemicals.

Evoqua has more than 40 years of experience in designing, manufacturing and servicing ultrapure water systems for microelectronics applications. We have kept pace with technology changes in this fast-paced industry, providing advanced water treatment technologies to help companies reach their objectives.


Ultraviolet (UV) Systems

UV is a proven, safe method of disinfection and offers protection against microorganisms such as bacteria, viruses, moulds, and pathogens without the use of chemicals. Evoqua’s range of high-performance UV disinfection systems are installed around the world to improve water quality, to support compliance needs, and to enable future resilience.


How Does UV Disinfection Work?

UV treatment is a physical process that works by causing permanent damage to cell DNA. Once the DNA becomes damaged, the organism is unable to carry out the routine cell functions of respiration. The option of utilising precision dosing of UV light helps facilities improve their water quality, which in turn reduces water consumption, delivering cost and sustainability targets and lowering operating costs. Within the microelectronics industry, UV is also commonly used to eliminate TOC.




TOC Reduction 

Reducing TOC to a consistently stable low level is critical in microelectronics to ensure any organic particles are removed from the process. Evoqua’s UV TOC reduction systems are playing a critical role in the ultrapure water process and helping manufacturers minimise product loss and maximise plant output.

Evoqua’s VT TOC Range of ETS™ UV Generators has been designed for superior TOC reduction in UPW processes. The system exposes the UPW to 185nm wavelength UV light. This process creates a short-lived hydroxyl radical which breaks down TOC into carbon dioxide for significantly improved UPW quality.

Benefits of UV Treatment in Microelectronics


  • Proven solution against a wide range of microorganisms 
  • Advanced capabilities to fight off microbial populations that are developing tolerance to chemicals
  • High performance, variable power systems reduce operating expense
  • Effective in TOC reduction 
  • Requires no storage, handling, or transportation of chemicals​
  • Designed to reduce cost of install and ease of retrofit into existing plants
  • Simple, fast and reliable maintenance with our TwistLok™ lamp configuration
  • Reduction in use of chemicals for the environment 
  • Aids in water reuse efforts by removing microcontaminants
Benefit Highlight
With TOC reduction units requiring higher dose levels than disinfection systems, the use of higher power lamps with enhanced 185nm efficiency, and longer life, results in less lamps, reduced maintenance and reduced OPEX costs.

VT TOC Range

With 185nm wavelength UV critical to efficient and effective UPW disinfection, Evoqua’s VT Series offers an industry-leading solution. With high-quality construction and materials, Evoqua’s lamps have a long life and require fewer total lamps for a given flow rate.

The VT Series helps to reduce capital and operational expenditure while delivering one of the most effective and efficient UPW disinfection solutions available on the market. The chemical free process allows for a more sustainable approach to TOC reduction, and our Spectra 3 control allows the operator to tailor the disinfection dose delivery in real time based on plant requirements, by means of variable power control.

The Evoqua VT TOC range is available in four models, covering a range of capacities. All models are designed to maximise the surface-area-to-volume ratio for improved treatment efficiency and are fully configurable to meet each customer’s specific requirements.

Safety Highlight
The use of Twistlok™ lamp connectors and V-clamp seal arrangements simplifies all maintenance activities. That simplicity, combined with the mechanical interlock, prevents operating lamps being removed from the reactor.

Evoqua is a trusted partner for high quality UV TOC reduction systems. To ensure your microelectronics process is operating at peak performance, contact us today!


Evoqua UV disinfection generator systems undergo third-party validation testing in accordance with the UVDGM (USEPA, 2006). Validated products are tested to confirm a minimum inactivation equivalent of 3 log (99.9%) for microorganisms in accordance with NSF/ANSI 50 and the UVDGM. Performance is not claimed nor implied for any product not yet validated; unvalidated products use single point summation calculations to provide delivered dose recommendations. Performance limitations depend on feed conditions, overall installed system design, and operation and maintenance processes; please refer to Operations Manuals. For more information: Contactus@evoqua.com