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Vanox® Systems Specifically Designed to Provide High Quality Water with Low TOC Content

Technology that surpasses the International Technology Roadmap for Semiconductors.
​At Evoqua we understand the Microelectronic water demands like no other system solution provider in the market. Simply meeting today's water quality demands is not good enough. Evoqua knows the next technology cycle will call for even more rigorous specifications that add to the costs for every chip produced. That is why Evoqua's technology surpasses the ITRS (International Technology Roadmap for Semiconductors) requirements by providing platforms that can be set to provide the support required for superior yield while balancing the resource requirements to run the equipment.​
​​The Vanox systems portfolio implements Total Organic Carbon (TOC) reduction technology that has surpassed all current technologies in performance. Our (n+1) design and superior analytical feedback has made us the system of choice for 300 mm manufacturing demands, as well as future 450 mm factories that are realizing the benefits of low TOC content water supply. We understand your needs where every hour of the day is needed to make your forecast and no one ever dares mention how well the factory is running. That is why we have supplied dozens of platforms used reliably on three continents with platforms in service since 2007. When you trust your factory's critical tools to a single vendor you know that Evoqua has the track record and proven experience to help you rest easy when you go home for the day. ​
Vanox AOP System​Organic species targeted reduction for Fab wide UPW feed for flows in the hundreds to thousands of gallons. Customers that initially realized the benefit of the Evoqua Vanox POU system soon discovered that lowering their overall organic contamination exposure to their product resulted in greater performance. The demand for a platform that could treat their entire process loop was created out of this demand. Capable of treating hundreds or thousands of gallons of water, this solution is not only modular, but also provided the process engineers with set-point flexibility.​​
Vanox POU System​The point-of-use platfo​​​rm provides critical flow to specific process stages that require low organic carbon contamination, low particles, tight temperature controlled tolerance, pressure, gases and metals. Ideally suited for immersion lithography toolsets this water not only extends the life of the lens, but provides the specific environment for superior process control. When tracking down yield or parametric issues as you ramp a new technology the last thing a process engineer wants to question is facility support. This is why Vanox POU systems are found not only in mature factory lines but also are key tools being utilized in the 450 mm factories of tomorrow.​​
Vanox Hot Water Conditioning Cart​The Vanox system HWC is a mobile platform engineered for preparing a UF module for service in a few days, as opposed to a few weeks, which is normally required. The hot water conditioning allows the module pores to cycle, shedding TOCs and particles inherent to the manufacture of the UF from the resins. This provides suitable prepping for more immediate service.​​​

 Vanox System Performance Examples

​The Vanox system initially developed for high purity applications is also very effective at contaminant removal for wastewater and water recycle applications. Effective elimination of Dioxane using the proven Vanox system is now possible and we are involved in partnering with customers demonstrating our ability to help them solve this complex and costly problem.

1,4 Dioxane, a compound linked to cancer, is a byproduct of solvents used in many industries from chemical, pharmaceutical, cosmetic and others.  This compound is difficult to remove and has seen limited success with other advanced oxidation systems such ae UV/Peroxide, and UV/Ozone. It also has a low affinity to activated carbon or other media alternatives. New regulations are emerging that will expand the already high number of locations that require treatment for both potable water and wastewater. Evoqua’s comprehensive process data demonstrates that Vanox systems can significantly outperform other technologies, while being significantly less expensive. In addition to 1,4 Dioxane, many other contaminants can be treated with Vanox systems​. 

For Recycle / Reclaim​                               % TOC Destruction ​
Ppb IPA as CVanox UV OnlyVanox UV + Oxidant

For Species Removal ​​​% TOC Destruction ​​
OrganicFeed ppbVanox UV OnlyVanox UV + Oxidation
1,4 Dioxane3063100
Formic Acid30100-
Humic Acid339099