Skip Navigation LinksEvoqua Water Technologies > en > Brands > Industrial Water and Wastewater Equipment and Services > Vanox® System for Point-of-Use Ultrapure Water Treatment Systems

 contact product expert

Chris Hall​
Product Manager

Vanox® System for Point-of-Use Ultrapure Water Treatment Systems

Evoqua introduces a method superior to traditional ozone or peroxide based processes for removing total organic carbon (TOC) in point-of-use (POU) systems.

​​Our proprietary advanced oxidation process used in the Vanox® POU system can consistently reduce TOC to 0.5 parts per billion (ppb) and treat seasonal TOC variations in feed water. This is important because TOC elevations above 1.0 ppb can directly affect the manufacturing process, significantly impacting product yields. Many immersion lithography tools require low organic content for warranty but their impact on process performance cannot be understated. The repeat orders for Vanox systems by nearly every factory they are placed in should be an indicator of how these tools can pay for themselves.

The Vanox system removes and/or controls urea and IPA, the primary organics that can require a more elaborate treatment. These difficult to control organics have been proven to impact yield and device performance especially at the most demanding process steps. THM (Trihalomethane), such as chloroform, which is generated as a by-product from the use of chlorine in municipal water treatment is readily controlled, as well.

In addition to TOC reduction the platform exceeds the ITRS specifications for particle reduction less than 100 unit per liter at 0.05 microns, critically stable temperature controls, low trace metal and gas removal. Each of these parameters have been proven to provide a stability for process control that only the Vanox POU platform can offer.

The fully redundant (n+1) designed Vanox POU systems offers 365 days, 24 hours uptime. The Vanox family of systems ramps to meet the incoming demand required preserving power, capital costs and chemical. By utilizing a suite of analytical measurement tools the tool offers continuous process control and access to streaming process data for constant tracking of the system and environmental promoters that it is responding to.​


​The Vanox system implements Total Organic Carbon (TOC) reduction technology that has surpassed all current technologies in performance. Our (n+1) design and superior analytical feedback has made us the system of choice for 300 mm manufacturing demands, as well as, future 450 mm factories that are realizing the benefits of low TOC content water supply. We understand your needs where every hour of the day is needed to make your forecast and no one ever dares mention how well the factory is running.  That is why we have supplied dozens of platforms used reliably on 3 continents with platforms in service since 2007.  When you trust your factory's critical tools to a single vendor you know that Evoqua has the track record and proven experience to help you rest easy when you go home for the day. 

 Vanox System Performance Examples

​​The Vanox system initially developed for high purity applications is also very effective at contaminant removal for wastewater and water recycle applications. Effective elimination of Dioxane using the proven Vanox system is now possible and we are involved in partnering with customers demonstrating our ability to help them solve this complex and costly problem.

1,4 Dioxane, a compound linked to cancer, is a byproduct of solvents used in many industries from chemical, pharmaceutical, cosmetic and others.  This compound is difficult to remove and has seen limited success with other advanced oxidation systems such ae UV/Peroxide, and UV/Ozone.  It also has a low affinity to activated carbon or other media alternatives. New regulations are emerging that will expand the already high number of locations that require treatment for both potable water and wastewater. Evoqua’s comprehensive process data demonstrates that Vanox systems can significantly outperform other technologies, while being significantly less expensive. In addition to 1,4 Dioxane, many other contaminants can be treated with Vanox systems. ​

For Recycle / Reclaim​% TOC Destruction ​
ppb IPA as CVanox UV OnlyVanox UV + Oxidant

For Species Removal ​​​% TOC Destruction ​​
OrganicFeed ppbVanox UV OnlyVanox UV + Oxidation
​1,2 Dichloroethane​300​39.5​73
1,4 Dioxane29672100
Formic Acid30100-
Humic Acid339099

 Related Products

Vanox AOP System​Organic species targeted reduction for Fab wide UPW feed for flows in the hundreds to thousands of gallons. Customers that initially realized the benefit of the Evoqua Vanox POU systems soon discovered that lowering their overall organic contamination exposure to their product resulted in greater performance. The demand for a platform that could treat their entire process loop was created out of this demand. Capable of treating hundreds or thousands of gallons of water, this solution is not only modular, but also provided the process engineers with set-point flexibility.​​
Vanox Hot Water Conditioning Cart​The Vanox system HWCC is a mobile platform engineered for preparing a UF module for service in a few days, as opposed to a few weeks, which is normally required. The hot water conditioning allows the module pores to cycle, shedding TOCs and particles inherent to the manufacture of the UF from the resins. This provides suitable prepping for more immediate service.​​
Vanox POU-F System ​The Vanox POU-F system is a compact ultra-clean point of use filtration system to remove particle from water feeding the critical clean tools used for semiconductor fabrication. 
christopherj.hall@evoqua.com Vanox® System for Point-of-Use Ultrapure Water Treatment Systems