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Chris Hall
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Vanox® AOP System for High Flow TOC Reduction

Evoqua introduces a high flow solution specifically for Total Organic Carbon (TOC) reduction
Our proprietary advanced oxidation process used in the Vanox® AOP System can consistently reduce TOC to 0.5 parts per billion (ppb) and treat seasonal TOC variations in feed water. This is important as organic carbon elevations above 1.0 ppb can directly affect the manufacturing process shown to significantly impact product yields. The repeat orders for Vanox systems by nearly every factory they are placed in are an indicator of how these tools are a valuable return on investment. Recent discoveries that the species of TOC is as important as the quantity of TOC's has generated interest on our patented process that attacks the specific TOC species that has the greatest impact on microelectronics productions. Species, such as urea, are the hardest to remove using the conventional UV or UV Peroxide / Ozone technology but are readily reduced with the Vanox system.
The Vanox system removes and / or controls urea primarily associated with THMs (Trihalomethane), such as chloroform, which is generated as a byproduct from the use of chlorine. The system also addresses urea and IPA, the primary organics that can require a more elaborate treatment. These difficult to control organics have been proven to impact yield and device performance especially at the most demanding process steps.
These systems have been validated at a variety of flows and total organic carbon demands. The Vanox AOP system offers the ability to scale the systems for future demand with a modular design coupled with the process ability to see the TOC effluent where the technology node requires it to be. In fact, the platforms have been found to be 450 mm enabling technology for several leading edge factories.
The fully redundant (n+1) designed Vanox AOP system offers 365 days, 24 hours uptime. The Vanox family of systems ramps control to meet the incoming demand required; preserving power, capital costs can chemical. By utilizing a suite of customized analytical measurement tools the Vanox AOP system offers continuous process control and access to streaming process data for constant tracking of the system and environmental parameters that it is responding to.


​​The Vanox system implements Total Organic Carbon (TOC) reduction technology that has surpassed all current technologies in performance. Our (n+1) design and superior analytical feedback has made us the system of choice for 300 mm manufacturing demands, as well as, future 450 mm factories that are realizing the benefits of low TOC content water supply. We understand your needs where every hour of the day is needed to make your forecast and no one ever dares mention how well the factory is running.  That is why we have supplied dozens of platforms used reliably on 3 continents with platforms in service since 2007.  When you trust your factory's critical tools to a single vendor you know that Evoqua has the track record and proven experience to help you rest easy when you go home for the day. ​

 Vanox System Performance Examples

​The Vanox system initially developed for high purity applications is also very effective at contaminant removal for wastewater and water recycle applications. Effective elimination of Dioxane using the proven Vanox system is now possible and we are involved in partnering with customers demonstrating our ability to help them solve this complex and costly problem.

1,4 Dioxane, a compound linked to cancer, is a byproduct of solvents used in many industries from chemical, pharmaceutical, cosmetic and others.  This compound is difficult to remove and has seen limited success with other advanced oxidation systems such ae UV/Peroxide, and UV/Ozone.  It also has a low affinity to activated carbon or other media alternatives. New regulations are emerging that will expand the already high number of locations that require treatment for both potable water and wastewater. Evoqua’s comprehensive process data demonstrates that Vanox systems can significantly outperform other technologies, while being significantly less expensive. In addition to 1,4 Dioxane, many other contaminants can be treated with Vanox systems.  

For Recycle / Reclaim​% TOC Destruction ​
ppb IPA as CVanox UV OnlyVanox UV + Oxidant

For Species Removal ​​​% TOC Destruction ​​
OrganicFeed ppbVanox UV OnlyVanox UV + Oxidation
​1,2 Dichloroethane​300​39.5​73
1,4 Dioxane29672100
Formic Acid30100-
Humic Acid339099

 Related Products

Vanox POU System​The point-of-use platfo​​​rm provides critical flow to specific process stages that require low organic carbon contamination, low particles, tight temperature controlled tolerance, pressure, gases and metals. Ideally suited for immersion lithography toolsets this water not only extends the life of the lens, but provides the specific environment for superior process control. When tracking down yield or parametric issues as you ramp a new technology the last thing a process engineer wants to question is their facility support. This is why Vanox POU systems are found not only in mature factory lines but also are key tools being utilized in the 450 mm factories of tomorrow.​​
Vanox Hot Water Conditioning Cart​The Vanox system HWCC is a mobile platform engineered for preparing a UF module for service in a few days, as opposed to a few weeks, which is normally required. The hot water conditioning allows the module pores to cycle, shedding TOCs and particles inherent to the manufacture of the UF from the resins. This provides suitable prepping for more immediate service.​
Vanox POU-F System​The Vanox POU-F System is a compact ultra-clean point of use filtration system to remove prarticle from water feeding the critical clean tools used for semiconductor fabrication
christopherj.hall@evoqua.com Vanox® AOP System for High Flow TOC Reduction